Fabrication of Microstructure Arrays on Photosensitive Glass by Femtosecond Laser
نویسندگان
چکیده
1 Graduate Institute of Opto-Mechatronics, National Chung Cheng University, No. 168, University Rd., Min-Hsiung, Chia-Yi 621, Taiwan 2 ITRI South, Industrial Technology Research Institute, No. 8, Gongyan Rd., Liujia District, Tainan 734, Taiwan 3 Department of Mechanical Engineering, National Chung Cheng University, No. 168, University Rd., Min-Hsiung, Chia-Yi 621, Taiwan 4 Department of Mechanical Engineering, National Chung Hsing University, 250 Kuo Kuang Rd., Taichung 402, Taiwan E-mail: [email protected] (C.W. Cheng) ; [email protected] (J.S. Chen)
منابع مشابه
Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching.
We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a b...
متن کاملFabrication and Optical Characterization of Silicon Nanostructure Arrays by Laser Interference Lithography and Metal-Assisted Chemical Etching
In this paper metal-assisted chemical etching has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer. In order to define silicon nanostructures, Metal-assisted chemical etching (MaCE) was carried out with silver catalyst. Provided solution (or materiel) in combination with laser interference lithogr...
متن کاملCompact 3D Microfluidic Channel Structures Embedded in Glass Fabricated by Femtosecond Laser Direct Writing
We demonstrate rapid fabrication of complex three-dimensional (3D) microfluidic channels with lengths up to ~6.0 cm within a tiny volume down to ~80 nl in glass substrates by femtosecond laser direct writing, which, to the best of our knowledge, is the longest microfluidic channel directly embedded in glass by femtosecond laser microprocessing. The fabrication mainly includes the following two ...
متن کامل3D microstructuring inside Foturan glass by femtosecond laser
We show that femtosecond (fs) laser enables us to produce true three-dimensional (3D) microstructures inside a photosensitive glass (Foturan), which has superior properties on transparency, hardness, and chemical and thermal resistances. Exposure to the focused laser beam writes latent images inside the glass. Modified regions are developed by a post baking process and then preferentially etche...
متن کاملBulk photochromism in a tungstate-phosphate glass: a new optical memory material?
In this work, we present a new photochromic tungstate based glass which have both absorption coefficient and refractive index modified under laser exposure. The photosensitive effect is superficial under ultraviolet (UV) irradiation but occurs in the entire volume of the glass under visible irradiation. The effect can be obtained in any specific point inside the volume using an infrared femtose...
متن کامل